Vertical cavity capacitive transducer

Name: Vertical cavity capacitive transducer
Author: Yaralıoğlu, Göksen Göksenin, Ergun, A. S., Bozkurt, A.

İsim	Vertical cavity capacitive transducer
Yazar	Yaralıoğlu, Göksen Göksenin, Ergun, A. S., Bozkurt, A.
Basım Tarihi:	2021-04-01
Basım Yeri	- American Institute of Physics Inc.
Tür	Süreli Yayın
Dil	İngilizce
Dijital	Evet
Yazma	Hayır
Kütüphane:	Özyeğin Üniversitesi
Demirbaş Numarası	0001-4966
Kayıt Numarası	ac936ef1-ba84-4a2c-8916-64149025bf91
Lokasyon	Electrical & Electronics Engineering
Tarih	2021-04-01
Örnek Metin	The capacitive micromachined ultrasonic transducer (CMUT) has inherent advantages, such as larger bandwidth and monolithic integration capability with electronics, when compared to the piezoelectric transducer. The most significant shortcoming of the device is the trade-off between input and output sensitivities. Adequate receive sensitivity requires an electric field intensity on the order of 105 V/m, which can be achieved by sub-micron gap heights. However, a small gap limits the device stroke and, consequently, the maximum output pressure. This paper addresses this problem by proposing a CMUT with a vertical cavity. The membrane of the device has a piston part that is surrounded by the sidewalls of a vertical cylinder formed in the substrate. The fringing electric field pulls the piston in the vertical direction; hence, the gap height remains fixed, which alleviates the hard limit on device stroke. The performance of the proposed device is compared to that of the conventional CMUT by theoretical and analytical methods, and a micro-fabrication method is devised. Additionally, a millimeter-scale device has been manufactured and tested as a proof of concept.
DOI	10.1121/10.0003931
Cilt	149

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Özyeğin Üniversitesi

Kaynağa git

Vertical cavity capacitive transducer

Yazar Yaralıoğlu, Göksen Göksenin, Ergun, A. S., Bozkurt, A.

Basım Tarihi 2021-04-01

Basım Yeri - American Institute of Physics Inc.

Tür Süreli Yayın

Dil İngilizce

Dijital Evet

Yazma Hayır

Kütüphane Özyeğin Üniversitesi

Demirbaş Numarası 0001-4966

Kayıt Numarası ac936ef1-ba84-4a2c-8916-64149025bf91

Lokasyon Electrical & Electronics Engineering

Tarih 2021-04-01

Örnek Metin The capacitive micromachined ultrasonic transducer (CMUT) has inherent advantages, such as larger bandwidth and monolithic integration capability with electronics, when compared to the piezoelectric transducer. The most significant shortcoming of the device is the trade-off between input and output sensitivities. Adequate receive sensitivity requires an electric field intensity on the order of 105 V/m, which can be achieved by sub-micron gap heights. However, a small gap limits the device stroke and, consequently, the maximum output pressure. This paper addresses this problem by proposing a CMUT with a vertical cavity. The membrane of the device has a piston part that is surrounded by the sidewalls of a vertical cylinder formed in the substrate. The fringing electric field pulls the piston in the vertical direction; hence, the gap height remains fixed, which alleviates the hard limit on device stroke. The performance of the proposed device is compared to that of the conventional CMUT by theoretical and analytical methods, and a micro-fabrication method is devised. Additionally, a millimeter-scale device has been manufactured and tested as a proof of concept.

DOI 10.1121/10.0003931

Cilt 149