Design, operation, and motion characteristics of a precise piezoelectric linear motor

Name: Design, operation, and motion characteristics of a precise piezoelectric linear motor
Author: Hii, K.-F., Vallance, R. R., Mengüç, Mustafa Pınar

İsim	Design, operation, and motion characteristics of a precise piezoelectric linear motor
Yazar	Hii, K.-F., Vallance, R. R., Mengüç, Mustafa Pınar
Basım Tarihi:	2010-04
Basım Yeri	- Elsevier
Konu	Nanopositioning, Actuator, Motor, Piezoelectric material, Thermal stability, Vacuum compatibility
Tür	Süreli Yayın
Dil	İngilizce
Dijital	Evet
Yazma	Hayır
Kütüphane:	Özyeğin Üniversitesi
Demirbaş Numarası	0141-6359
Kayıt Numarası	fda59dbd-1997-4c7f-b61b-313ab4598547
Lokasyon	Mechanical Engineering
Tarih	2010-04
Notlar	Due to copyright restrictions, the access to the full text of this article is only available via subscription.
Örnek Metin	This paper presents the design, operation, and motion characteristics of a precise piezoelectric motor for linear translation. The motor is compact, thermally stable, ultra-high vacuum compatible, and suitable for applications requiring fine resolution over millimeter-long travel ranges. Inside the motor, a translating alumina prism is symmetrically constrained within a stationary structure by a compliant suspension that preloads six shear-mode piezoelectric actuators against flat surfaces on the prism. A single step is achieved by sequentially sliding each piezoelectric actuator backward along the prism’s surfaces and then simultaneously moving all actuators forward. Many steps are repeated at 60 Hz for longer translations. Experiments indicate that: the step size is adjustable between 5 nm and 225 nm, the motor can reach speeds of 13.5 View the MathML sourcem/s, the step size is highly uniform with a standard deviation of about 1.2 nm, error motion in the direction orthogonal to the translation is about 800 nm peak-to-valley, and the thermal stability is better than 40 nm/ °C.
DOI	10.1016/j.precisioneng.2009.06.005
Cilt	34

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Design, operation, and motion characteristics of a precise piezoelectric linear motor

Yazar Hii, K.-F., Vallance, R. R., Mengüç, Mustafa Pınar

Basım Tarihi 2010-04

Basım Yeri - Elsevier

Konu Nanopositioning, Actuator, Motor, Piezoelectric material, Thermal stability, Vacuum compatibility

Tür Süreli Yayın

Dil İngilizce

Dijital Evet

Yazma Hayır

Kütüphane Özyeğin Üniversitesi

Demirbaş Numarası 0141-6359

Kayıt Numarası fda59dbd-1997-4c7f-b61b-313ab4598547

Lokasyon Mechanical Engineering

Tarih 2010-04

Notlar Due to copyright restrictions, the access to the full text of this article is only available via subscription.

Örnek Metin This paper presents the design, operation, and motion characteristics of a precise piezoelectric motor for linear translation. The motor is compact, thermally stable, ultra-high vacuum compatible, and suitable for applications requiring fine resolution over millimeter-long travel ranges. Inside the motor, a translating alumina prism is symmetrically constrained within a stationary structure by a compliant suspension that preloads six shear-mode piezoelectric actuators against flat surfaces on the prism. A single step is achieved by sequentially sliding each piezoelectric actuator backward along the prism’s surfaces and then simultaneously moving all actuators forward. Many steps are repeated at 60 Hz for longer translations. Experiments indicate that: the step size is adjustable between 5 nm and 225 nm, the motor can reach speeds of 13.5 View the MathML sourcem/s, the step size is highly uniform with a standard deviation of about 1.2 nm, error motion in the direction orthogonal to the translation is about 800 nm peak-to-valley, and the thermal stability is better than 40 nm/ °C.

DOI 10.1016/j.precisioneng.2009.06.005

Cilt 34