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Design, operation, and motion characteristics of a precise piezoelectric linear motor

Title	Design, operation, and motion characteristics of a precise piezoelectric linear motor
Author	Hii, K.-F., Vallance, R. R., Mengüç, Mustafa Pınar
Publication Date:	2010-04
Publication Place	- Elsevier
Subject	Nanopositioning, Actuator, Motor, Piezoelectric material, Thermal stability, Vacuum compatibility
Type	Periodical
Language	English
Digital	Yes
Manuscript	No
Library:	Özyeğin University
Library Asset ID	0141-6359
Record ID	fda59dbd-1997-4c7f-b61b-313ab4598547
Library Location	Mechanical Engineering
Date	2010-04
Notes	Due to copyright restrictions, the access to the full text of this article is only available via subscription.
Sample Text	This paper presents the design, operation, and motion characteristics of a precise piezoelectric motor for linear translation. The motor is compact, thermally stable, ultra-high vacuum compatible, and suitable for applications requiring fine resolution over millimeter-long travel ranges. Inside the motor, a translating alumina prism is symmetrically constrained within a stationary structure by a compliant suspension that preloads six shear-mode piezoelectric actuators against flat surfaces on the prism. A single step is achieved by sequentially sliding each piezoelectric actuator backward along the prism’s surfaces and then simultaneously moving all actuators forward. Many steps are repeated at 60 Hz for longer translations. Experiments indicate that: the step size is adjustable between 5 nm and 225 nm, the motor can reach speeds of 13.5 View the MathML sourcem/s, the step size is highly uniform with a standard deviation of about 1.2 nm, error motion in the direction orthogonal to the translation is about 800 nm peak-to-valley, and the thermal stability is better than 40 nm/ °C.
DOI	10.1016/j.precisioneng.2009.06.005
Cilt	34

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Özyeğin University

Design, operation, and motion characteristics of a precise piezoelectric linear motor

Author Hii, K.-F., Vallance, R. R., Mengüç, Mustafa Pınar

Publication Date 2010-04

Publication Place - Elsevier

Subject Nanopositioning, Actuator, Motor, Piezoelectric material, Thermal stability, Vacuum compatibility

Type Periodical

Language English

Digital Yes

Manuscript No

Library Özyeğin University

Library Asset ID 0141-6359

Record ID fda59dbd-1997-4c7f-b61b-313ab4598547

Library Location Mechanical Engineering

Date 2010-04

Notes Due to copyright restrictions, the access to the full text of this article is only available via subscription.

Sample Text This paper presents the design, operation, and motion characteristics of a precise piezoelectric motor for linear translation. The motor is compact, thermally stable, ultra-high vacuum compatible, and suitable for applications requiring fine resolution over millimeter-long travel ranges. Inside the motor, a translating alumina prism is symmetrically constrained within a stationary structure by a compliant suspension that preloads six shear-mode piezoelectric actuators against flat surfaces on the prism. A single step is achieved by sequentially sliding each piezoelectric actuator backward along the prism’s surfaces and then simultaneously moving all actuators forward. Many steps are repeated at 60 Hz for longer translations. Experiments indicate that: the step size is adjustable between 5 nm and 225 nm, the motor can reach speeds of 13.5 View the MathML sourcem/s, the step size is highly uniform with a standard deviation of about 1.2 nm, error motion in the direction orthogonal to the translation is about 800 nm peak-to-valley, and the thermal stability is better than 40 nm/ °C.

DOI 10.1016/j.precisioneng.2009.06.005

Cilt 34