Author
Huang, X., Yan, H., Ge, M., Öztürk, Hande, Fang, Y.-L. L., Ha, S., Lin, M., Lu, M., Nazaretski, E., Robinson, I. K., Chu, Y. S.
Publication Date
2019-03
Publication Place
-
International Union of Crystallography
Subject
X-ray ptychography, Multi-slice approach, Nanostructures
Type
Periodical
Language
English
Digital
Yes
Manuscript
No
Library
Özyeğin University
Library Asset ID
2053-2733
Record ID
4cc683e6-d27a-4060-b6b0-75a0ed2647c4
Library Location
Mechanical Engineering
Date
2019-03
Notes
Laboratory Directed Research and Development program from the Brookhaven National Laboratory ; United States Department of Energy (DOE)
Sample Text
Multi-slice X-ray ptychography offers an approach to achieve images with a nanometre-scale resolution from samples with thicknesses larger than the depth of field of the imaging system by modeling a thick sample as a set of thin slices and accounting for the wavefront propagation effects within the specimen. Here, we present an experimental demonstration that resolves two layers of nanostructures separated by 500 nm along the axial direction, with sub-10 nm and sub-20 nm resolutions on two layers, respectively. Fluorescence maps are simultaneously measured in the multi-modality imaging scheme to assist in decoupling the mixture of low-spatial-frequency features across different slices. The enhanced axial sectioning capability using correlative signals obtained from multi-modality measurements demonstrates the great potential of the multi-slice ptychography method for investigating specimens with extended dimensions in 3D with high resolution.
DOI
10.1107/S2053273318017229
Cilt
75
