MEMS cantilever sensor array oscillators: Theory and experiments

Name: MEMS cantilever sensor array oscillators: Theory and experiments
Author: Lulec, S. Z., Adiyan, U., Yaralıoğlu, Göksen Göksenin, Leblebici, Y., Urey, H.

İsim	MEMS cantilever sensor array oscillators: Theory and experiments
Yazar	Lulec, S. Z., Adiyan, U., Yaralıoğlu, Göksen Göksenin, Leblebici, Y., Urey, H.
Basım Tarihi:	2016-01-01
Basım Yeri	- Elsevier
Konu	Biosensors, MEMS cantilever sensor arrays, Multiple self-sustained oscillation, Interferometric readout, Diffraction grating
Tür	Süreli Yayın
Dil	İngilizce
Dijital	Evet
Yazma	Hayır
Kütüphane:	Özyeğin Üniversitesi
Demirbaş Numarası	0924-4247
Kayıt Numarası	80acc772-6de9-41cf-8707-5cee369ca201
Lokasyon	Electrical & Electronics Engineering
Tarih	2016-01-01
Notlar	Due to copyright restrictions, the access to the full text of this article is only available via subscription.
Örnek Metin	This paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved in a feed-back loop using gain saturation mechanism in the electronics. Multiple cantilevers require separate saturation mechanisms and separate sensing electronics for each channel. We introduced optical non-linearity using diffraction gratings at the tip of each cantilever which provide separate saturation non-linearity, enabling a single detector based oscillator array. Two-cantilever SSO operation is investigated analytically, and the multiple frequency oscillation criteria are established. Cross-coupling between the oscillation frequencies has been investigated by using this multi cantilever model. The proposed model will be helpful to design dynamic‑mode MEMS (Micro-electro-mechanical systems) cantilever sensor arrays with the desired functionality and cross-talk levels. This multiple SSO operation can be used in conjunction with dense cantilever arrays for various biosensor applications. Moreover, the model can also be useful to understand the operation of any kind of multiple simultaneous oscillator systems, which employs a single feed-back loop. We also present experimental results that confirm our model.
DOI	10.1016/j.sna.2015.11.028
Cilt	237

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MEMS cantilever sensor array oscillators: Theory and experiments

Yazar Lulec, S. Z., Adiyan, U., Yaralıoğlu, Göksen Göksenin, Leblebici, Y., Urey, H.

Basım Tarihi 2016-01-01

Basım Yeri - Elsevier

Konu Biosensors, MEMS cantilever sensor arrays, Multiple self-sustained oscillation, Interferometric readout, Diffraction grating

Tür Süreli Yayın

Dil İngilizce

Dijital Evet

Yazma Hayır

Kütüphane Özyeğin Üniversitesi

Demirbaş Numarası 0924-4247

Kayıt Numarası 80acc772-6de9-41cf-8707-5cee369ca201

Lokasyon Electrical & Electronics Engineering

Tarih 2016-01-01

Notlar Due to copyright restrictions, the access to the full text of this article is only available via subscription.

Örnek Metin This paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved in a feed-back loop using gain saturation mechanism in the electronics. Multiple cantilevers require separate saturation mechanisms and separate sensing electronics for each channel. We introduced optical non-linearity using diffraction gratings at the tip of each cantilever which provide separate saturation non-linearity, enabling a single detector based oscillator array. Two-cantilever SSO operation is investigated analytically, and the multiple frequency oscillation criteria are established. Cross-coupling between the oscillation frequencies has been investigated by using this multi cantilever model. The proposed model will be helpful to design dynamic‑mode MEMS (Micro-electro-mechanical systems) cantilever sensor arrays with the desired functionality and cross-talk levels. This multiple SSO operation can be used in conjunction with dense cantilever arrays for various biosensor applications. Moreover, the model can also be useful to understand the operation of any kind of multiple simultaneous oscillator systems, which employs a single feed-back loop. We also present experimental results that confirm our model.

DOI 10.1016/j.sna.2015.11.028

Cilt 237