Author
Lulec, S. Z., Adiyan, U., Yaralıoğlu, Göksen Göksenin, Leblebici, Y., Urey, H.
Publication Date
2016-01-01
Publication Place
-
Elsevier
Subject
Biosensors, MEMS cantilever sensor arrays, Multiple self-sustained oscillation, Interferometric readout, Diffraction grating
Type
Periodical
Language
English
Digital
Yes
Manuscript
No
Library
Özyeğin University
Library Asset ID
0924-4247
Record ID
80acc772-6de9-41cf-8707-5cee369ca201
Library Location
Electrical & Electronics Engineering
Date
2016-01-01
Notes
Due to copyright restrictions, the access to the full text of this article is only available via subscription.
Sample Text
This paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved in a feed-back loop using gain saturation mechanism in the electronics. Multiple cantilevers require separate saturation mechanisms and separate sensing electronics for each channel. We introduced optical non-linearity using diffraction gratings at the tip of each cantilever which provide separate saturation non-linearity, enabling a single detector based oscillator array. Two-cantilever SSO operation is investigated analytically, and the multiple frequency oscillation criteria are established. Cross-coupling between the oscillation frequencies has been investigated by using this multi cantilever model. The proposed model will be helpful to design dynamic‑mode MEMS (Micro-electro-mechanical systems) cantilever sensor arrays with the desired functionality and cross-talk levels. This multiple SSO operation can be used in conjunction with dense cantilever arrays for various biosensor applications. Moreover, the model can also be useful to understand the operation of any kind of multiple simultaneous oscillator systems, which employs a single feed-back loop. We also present experimental results that confirm our model.
DOI
10.1016/j.sna.2015.11.028
Cilt
237
