Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances

Name: Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances
Author: Kemal, Remzi Erkan, Bozkurt, A., Yaralıoğlu, Göksen Göksenin

İsim	Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances
Yazar	Kemal, Remzi Erkan, Bozkurt, A., Yaralıoğlu, Göksen Göksenin
Basım Tarihi:	2020-12
Basım Yeri	- Springer Nature
Tür	Süreli Yayın
Dil	İngilizce
Dijital	Evet
Yazma	Hayır
Kütüphane:	Özyeğin Üniversitesi
Demirbaş Numarası	0946-7076
Kayıt Numarası	6e709a2f-4b0a-4d1f-8f35-bc2753a62247
Lokasyon	Electrical & Electronics Engineering
Tarih	2020-12
Örnek Metin	Equivalent circuit models have been long used to evaluate the dynamics of the capacitive micromachined ultrasonic transducer (CMUT). An important parameter in the characterization of a CMUT is the anti-resonance frequency, which limits the immersion bandwidth. However, there is no equivalent circuit model that can accurately determine the anti-resonance frequency of a membrane. In this work, we present an improved lumped element parametric model for immersed CMUT. We demonstrate that the proposed equivalent circuit model accurately predicts anti-resonance and higher order mode frequencies, in addition to that of the fundamental mode. The proposed circuit model is in good agreement with device characteristics calculated using the finite element method and experimentally measured data.
DOI	10.1007/s00542-020-04849-y
Cilt	26

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Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances

Yazar Kemal, Remzi Erkan, Bozkurt, A., Yaralıoğlu, Göksen Göksenin

Basım Tarihi 2020-12

Basım Yeri - Springer Nature

Tür Süreli Yayın

Dil İngilizce

Dijital Evet

Yazma Hayır

Kütüphane Özyeğin Üniversitesi

Demirbaş Numarası 0946-7076

Kayıt Numarası 6e709a2f-4b0a-4d1f-8f35-bc2753a62247

Lokasyon Electrical & Electronics Engineering

Tarih 2020-12

Örnek Metin Equivalent circuit models have been long used to evaluate the dynamics of the capacitive micromachined ultrasonic transducer (CMUT). An important parameter in the characterization of a CMUT is the anti-resonance frequency, which limits the immersion bandwidth. However, there is no equivalent circuit model that can accurately determine the anti-resonance frequency of a membrane. In this work, we present an improved lumped element parametric model for immersed CMUT. We demonstrate that the proposed equivalent circuit model accurately predicts anti-resonance and higher order mode frequencies, in addition to that of the fundamental mode. The proposed circuit model is in good agreement with device characteristics calculated using the finite element method and experimentally measured data.

DOI 10.1007/s00542-020-04849-y

Cilt 26