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Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances

Title	Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances
Author	Kemal, Remzi Erkan, Bozkurt, A., Yaralıoğlu, Göksen Göksenin
Publication Date:	2020-12
Publication Place	- Springer Nature
Type	Periodical
Language	English
Digital	Yes
Manuscript	No
Library:	Özyeğin University
Library Asset ID	0946-7076
Record ID	6e709a2f-4b0a-4d1f-8f35-bc2753a62247
Library Location	Electrical & Electronics Engineering
Date	2020-12
Sample Text	Equivalent circuit models have been long used to evaluate the dynamics of the capacitive micromachined ultrasonic transducer (CMUT). An important parameter in the characterization of a CMUT is the anti-resonance frequency, which limits the immersion bandwidth. However, there is no equivalent circuit model that can accurately determine the anti-resonance frequency of a membrane. In this work, we present an improved lumped element parametric model for immersed CMUT. We demonstrate that the proposed equivalent circuit model accurately predicts anti-resonance and higher order mode frequencies, in addition to that of the fundamental mode. The proposed circuit model is in good agreement with device characteristics calculated using the finite element method and experimentally measured data.
DOI	10.1007/s00542-020-04849-y
Cilt	26

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Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances

Author Kemal, Remzi Erkan, Bozkurt, A., Yaralıoğlu, Göksen Göksenin

Publication Date 2020-12

Publication Place - Springer Nature

Type Periodical

Language English

Digital Yes

Manuscript No

Library Özyeğin University

Library Asset ID 0946-7076

Record ID 6e709a2f-4b0a-4d1f-8f35-bc2753a62247

Library Location Electrical & Electronics Engineering

Date 2020-12

Sample Text Equivalent circuit models have been long used to evaluate the dynamics of the capacitive micromachined ultrasonic transducer (CMUT). An important parameter in the characterization of a CMUT is the anti-resonance frequency, which limits the immersion bandwidth. However, there is no equivalent circuit model that can accurately determine the anti-resonance frequency of a membrane. In this work, we present an improved lumped element parametric model for immersed CMUT. We demonstrate that the proposed equivalent circuit model accurately predicts anti-resonance and higher order mode frequencies, in addition to that of the fundamental mode. The proposed circuit model is in good agreement with device characteristics calculated using the finite element method and experimentally measured data.

DOI 10.1007/s00542-020-04849-y

Cilt 26