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Optical fiber array based simultaneous parallel monitoring of resonant cantilever sensors in liquid

Title	Optical fiber array based simultaneous parallel monitoring of resonant cantilever sensors in liquid
Author	Mostafazadeh, A., Yaralıoğlu, Göksen Göksenin, Urey, H.
Publication Date:	2016-05-01
Publication Place	- Elsevier
Subject	MEMS sensors in liquid, Multichannel resonant frequency tracking, Optical fiber array readout, Magnetic actuation, Multichannel lock-in amplifier, Phase based resonance tracking
Type	Periodical
Language	English
Digital	Yes
Manuscript	No
Library:	Özyeğin University
Library Asset ID	0924-4247
Record ID	09219f9f-76b4-49ea-aa55-645b3d9b3abd
Library Location	Electrical & Electronics Engineering
Date	2016-05-01
Notes	Due to copyright restrictions, the access to the full text of this article is only available via subscription.
Sample Text	This paper reports a novel method for simultaneous resonance monitoring of MEMS cantilevers using phase based dynamic measurements without any electrical connections to the sensor array. MEMS cantilevers are made of electroplated nickel and actuated remotely with magnetic field using an electro-coil. To our knowledge this is the first demonstration of simultaneous parallel optical monitoring of dynamic mode micro-cantilever array in liquid environment. Illumination is generated using a laser source and a diffractive pattern generator, which provides 500 μW laser power per channel. A compact fiber array based pick-up was built for optical readout. Its main advantages are easy customization to different size and pitch of sensor array, and good immunity to electrical noise and magnetic interference as the photo detectors are located away from the electro-coil. The resonant frequency of the cantilever is tracked with a custom multi-channel lock-in amplifier implemented in software. For demonstrating the stability and sensitivity of the system we performed measurements using glycerol solutions with different viscosities. Measured phase sensitivity was 0.9°/1% of Glycerol/DI-water solution and the standard deviation of measured phase was 0.025°. The resulting detection limit for Glycerol/DI-water solution was 280 ppm. The proposed method showed robust results with low laser power and very good noise immunity to interference signals and environmental vibrations. The sensor technology demonstrated here is very significant as it is scalable to larger arrays for simultaneous and real- time monitoring of multiple biological and chemical agents during fluid flow.
DOI	10.1016/j.sna.2016.03.004
Cilt	242

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Özyeğin University

Optical fiber array based simultaneous parallel monitoring of resonant cantilever sensors in liquid

Author Mostafazadeh, A., Yaralıoğlu, Göksen Göksenin, Urey, H.

Publication Date 2016-05-01

Publication Place - Elsevier

Subject MEMS sensors in liquid, Multichannel resonant frequency tracking, Optical fiber array readout, Magnetic actuation, Multichannel lock-in amplifier, Phase based resonance tracking

Type Periodical

Language English

Digital Yes

Manuscript No

Library Özyeğin University

Library Asset ID 0924-4247

Record ID 09219f9f-76b4-49ea-aa55-645b3d9b3abd

Library Location Electrical & Electronics Engineering

Date 2016-05-01

Notes Due to copyright restrictions, the access to the full text of this article is only available via subscription.

Sample Text This paper reports a novel method for simultaneous resonance monitoring of MEMS cantilevers using phase based dynamic measurements without any electrical connections to the sensor array. MEMS cantilevers are made of electroplated nickel and actuated remotely with magnetic field using an electro-coil. To our knowledge this is the first demonstration of simultaneous parallel optical monitoring of dynamic mode micro-cantilever array in liquid environment. Illumination is generated using a laser source and a diffractive pattern generator, which provides 500 μW laser power per channel. A compact fiber array based pick-up was built for optical readout. Its main advantages are easy customization to different size and pitch of sensor array, and good immunity to electrical noise and magnetic interference as the photo detectors are located away from the electro-coil. The resonant frequency of the cantilever is tracked with a custom multi-channel lock-in amplifier implemented in software. For demonstrating the stability and sensitivity of the system we performed measurements using glycerol solutions with different viscosities. Measured phase sensitivity was 0.9°/1% of Glycerol/DI-water solution and the standard deviation of measured phase was 0.025°. The resulting detection limit for Glycerol/DI-water solution was 280 ppm. The proposed method showed robust results with low laser power and very good noise immunity to interference signals and environmental vibrations. The sensor technology demonstrated here is very significant as it is scalable to larger arrays for simultaneous and real- time monitoring of multiple biological and chemical agents during fluid flow.

DOI 10.1016/j.sna.2016.03.004

Cilt 242