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Design and fabrication of high-frequency ultra-wideband 1D CMUT arrays for acoustic angiography applications - preliminary results

Title	Design and fabrication of high-frequency ultra-wideband 1D CMUT arrays for acoustic angiography applications - preliminary results
Author	Adelegan, O. J., Kemal, Remzi Erkan, Yamaner, F. Y., Dayton, P. A., Oralkan, Ö.
Publication Date:	2018-12-20
Publication Place	- IEEE
Subject	Acoustic angiography, High-frequency, Ultra-wideband, Anodic bonding, CMUT
Type	Document
Language	English
Digital	Yes
Manuscript	No
Library:	Özyeğin University
Library Asset ID	978-1-5386-3425-7
Record ID	399637ee-4188-4729-91ff-dd9ea340df2a
Date	2018-12-20
Notes	National Science Foundation (NSF) ; NSF - Office of the Director (OD)
Sample Text	For superharmonic imaging applications involving the use of microbubble contrast agents, transducers that can transmit energy at low frequencies (less than 5 MHz) to excite the microbubbles, and at the same time detect scattered echoes at higher harmonics (greater than 20 MHz) are essential. We explored the advantages of a thin silicon plate with an added central mass combined with a reduced bottom electrode area to further improve the bandwidth of 1D capacitive micromachined ultrasonic transducer arrays. FEM simulation results show that the fabricated devices can transmit at low frequency (<;3 MHz) and receive echoes at high frequency (beyond 30 MHz). This translates into a 180% fractional bandwidth at 17 MHz for the fabricated 1D CMUT array.
DOI	10.1109/ULTSYM.2018.8579874
Cilt	2018

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Özyeğin University

Design and fabrication of high-frequency ultra-wideband 1D CMUT arrays for acoustic angiography applications - preliminary results

Author Adelegan, O. J., Kemal, Remzi Erkan, Yamaner, F. Y., Dayton, P. A., Oralkan, Ö.

Publication Date 2018-12-20

Publication Place - IEEE

Subject Acoustic angiography, High-frequency, Ultra-wideband, Anodic bonding, CMUT

Type Document

Language English

Digital Yes

Manuscript No

Library Özyeğin University

Library Asset ID 978-1-5386-3425-7

Record ID 399637ee-4188-4729-91ff-dd9ea340df2a

Date 2018-12-20

Notes National Science Foundation (NSF) ; NSF - Office of the Director (OD)

Sample Text For superharmonic imaging applications involving the use of microbubble contrast agents, transducers that can transmit energy at low frequencies (less than 5 MHz) to excite the microbubbles, and at the same time detect scattered echoes at higher harmonics (greater than 20 MHz) are essential. We explored the advantages of a thin silicon plate with an added central mass combined with a reduced bottom electrode area to further improve the bandwidth of 1D capacitive micromachined ultrasonic transducer arrays. FEM simulation results show that the fabricated devices can transmit at low frequency (<;3 MHz) and receive echoes at high frequency (beyond 30 MHz). This translates into a 180% fractional bandwidth at 17 MHz for the fabricated 1D CMUT array.

DOI 10.1109/ULTSYM.2018.8579874

Cilt 2018