Author
Lüleç, S. Z., Adiyan, U., Yaralıoğlu, Göksen Göksenin, Leblebici, Y., Urey, H.
Publication Date
2015
Publication Place
-
IEEE
Subject
MEMS cantilever sensor arrays, Multiple selfsustained oscillation, Interferometric readout
Type
Document
Language
English
Digital
Yes
Manuscript
No
Library
Özyeğin University
Library Asset ID
978-1-4673-6834-6
Record ID
588f7b83-0f0c-4d09-b564-19c900490c4b
Library Location
Electrical & Electronics Engineering
Date
2015
Notes
Due to copyright restrictions, the access to the full text of this article is only available via subscription.
Sample Text
MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
DOI
10.1109/OMN.2015.7288835
