A prism-based non-linear optical readout method for MEMS cantilever arrays

Name: A prism-based non-linear optical readout method for MEMS cantilever arrays
Author: Adiyan, U., Civitci, F., Yaralıoğlu, Göksen Göksenin, Urey, H.

İsim	A prism-based non-linear optical readout method for MEMS cantilever arrays
Yazar	Adiyan, U., Civitci, F., Yaralıoğlu, Göksen Göksenin, Urey, H.
Basım Tarihi:	2016-10-15
Basım Yeri	- Elsevier
Konu	Non-linear optical readout, MEMS cantilever sensor arrays, Self-sustained oscillations, Critical angle, Non-linear optical readout, MEMS cantilever sensor arrays, Self-sustained oscillations, Critical angle
Tür	Süreli Yayın
Dil	İngilizce
Dijital	Evet
Yazma	Hayır
Kütüphane:	Özyeğin Üniversitesi
Demirbaş Numarası	0924-4247
Kayıt Numarası	526a444e-6e44-4110-a232-fcd4fe750093
Lokasyon	Electrical & Electronics Engineering
Tarih	2016-10-15
Notlar	TÜBİTAK
Örnek Metin	This paper demonstrates the use of a single right-angle prism for the optical readout of micro-electro-mechanical systems (MEMS) cantilever arrays. The non-linear reflectivity arisen from the internal reflection at the right-angle prism’s hypotenuse plane enables the measurement of cantilever deflections. The cantilever arrays used in the experiments are made of electroplated nickel structures and actuated at resonance by an external electro-coil. A laser beam illuminates multiple cantilevers, and then it is partially reflected by the prism. The prism reflectivity changes with the cantilever deflection and modulates the laser intensity at the photodetector. The detection sensitivity of the optical readout system is determined by the initial angle of incidence at the prism’s hypotenuse plane, numerical aperture of the illumination system and the polarization of the laser beam. In this paper, we showed both theoretically and experimentally that self-sustained oscillations of two MEMS cantilevers with simple rectangular geometry is achievable using only one actuator and one photodetector. The gain saturation mechanism for the oscillators was provided by the optical non-linearity in the prism readout, which eliminates the requirement for separate sensing electronics for each cantilever. Based on our analytical and experimental data, we found that the prism incident angle around 41.2° is desirable in the closed-loop system due to high responsivity. Finally, we demonstrated simultaneous self-sustained oscillations of two cantilevers in closed-loop with resonant frequencies in the range 25–30 kHz. It was shown that multiple oscillations are obtainable if the cantilever resonant frequencies are separated from each other by at least 3 dB bandwidth.
DOI	10.1016/j.sna.2016.09.018

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A prism-based non-linear optical readout method for MEMS cantilever arrays

Yazar Adiyan, U., Civitci, F., Yaralıoğlu, Göksen Göksenin, Urey, H.

Basım Tarihi 2016-10-15

Basım Yeri - Elsevier

Konu Non-linear optical readout, MEMS cantilever sensor arrays, Self-sustained oscillations, Critical angle, Non-linear optical readout, MEMS cantilever sensor arrays, Self-sustained oscillations, Critical angle

Tür Süreli Yayın

Dil İngilizce

Dijital Evet

Yazma Hayır

Kütüphane Özyeğin Üniversitesi

Demirbaş Numarası 0924-4247

Kayıt Numarası 526a444e-6e44-4110-a232-fcd4fe750093

Lokasyon Electrical & Electronics Engineering

Tarih 2016-10-15

Notlar TÜBİTAK

Örnek Metin This paper demonstrates the use of a single right-angle prism for the optical readout of micro-electro-mechanical systems (MEMS) cantilever arrays. The non-linear reflectivity arisen from the internal reflection at the right-angle prism’s hypotenuse plane enables the measurement of cantilever deflections. The cantilever arrays used in the experiments are made of electroplated nickel structures and actuated at resonance by an external electro-coil. A laser beam illuminates multiple cantilevers, and then it is partially reflected by the prism. The prism reflectivity changes with the cantilever deflection and modulates the laser intensity at the photodetector. The detection sensitivity of the optical readout system is determined by the initial angle of incidence at the prism’s hypotenuse plane, numerical aperture of the illumination system and the polarization of the laser beam. In this paper, we showed both theoretically and experimentally that self-sustained oscillations of two MEMS cantilevers with simple rectangular geometry is achievable using only one actuator and one photodetector. The gain saturation mechanism for the oscillators was provided by the optical non-linearity in the prism readout, which eliminates the requirement for separate sensing electronics for each cantilever. Based on our analytical and experimental data, we found that the prism incident angle around 41.2° is desirable in the closed-loop system due to high responsivity. Finally, we demonstrated simultaneous self-sustained oscillations of two cantilevers in closed-loop with resonant frequencies in the range 25–30 kHz. It was shown that multiple oscillations are obtainable if the cantilever resonant frequencies are separated from each other by at least 3 dB bandwidth.

DOI 10.1016/j.sna.2016.09.018